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The JXT-1000 series is a single arm multi joint clean atmosphere robot, mainly used for handling and conveying in processes such as wafer processing and inspection. Suitable for 2/4/6/8/12 inch wafers with high precision, stability, and cleanliness. Products can be customized according to wafer shape, size, material, and production needs.
Standard arm length for robotic arms: 100mm, 160mm, 210mm, etc. (customizable)
Control communication mode: Ethernet port and parallel port I/O mode
Motor with absolute value encoder for all axes
The S-curve acceleration and deceleration control method and optimization of the motion trajectory enable high-speed and high-precision handling of semiconductor wafers
Wafer fixation methods: vacuum adsorption, bottom support, edge clamping, Bernoulli non-contact
Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials
Fingers can be flipped, providing optimal finger placement for the type of object being transported, equipment layout, and other requirements
Single-arm Wafer Robot Specifications | ||
| Model | JXT-1000 Series | |
| Carrying Object | 2/4/6/8/12 inch standard size wafer, glass substrates | |
| Standard arm length | Standard robot arms: 100mm, 160mm, 210mm (Customizable) | |
| Holding Method | Vacuum, Edge clamping, Bernoulli non-contact | |
| Repeatability | Repeatability: ±0.1 mm | |
| Robot Model Type | Cylindrical coordinate type | |
| Motor Type | Servo Motor/Stepping Motor | |
| Control Axis | 3-axis | |
| Payload | 0.5kg | |
Operating Range | From the robot center to the wafer center | Subject to the mechanical drawings |
| Rotation Angle (Theta-axis) | 340 degree | |
| Vertical Stroke (Z-axis) | Subject to the mechanical drawings | |
| Carrying Speed（Ave.） | Arm (R-axis) | 570 mm/sec |
| Rotation Angle (Theta-axis) | 220 degree/sec | |
| Vertical Stroke (Z-axis) | 200 mm/sec | |
| Carrying Speed*（Max.） | Arm (R-axis) | 1140 mm/sec |
| Rotation Angle (Theta-axis) | 270 degree/sec | |
| Vertical Stroke (Z-axis) | 250 mm/sec | |
| Cleanliness | ISO Standard Class1-3 (at wafer transfer level when exhausting driving part) | |
| Utility | Power: AC200V Single phase ±10% 2kVA; Vacuum: -53kPa or more | |
| Mass | About 25kg | |
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