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This product is a single arm, two finger, multi joint clean robot, mainly used for handling and conveying in processes such as wafer processing and inspection. Suitable for wafers of 2/4/6/8/12 inches and other sizes, it has the characteristics of high precision, high stability, and high cleanliness. The product can be customized according to the production requirements of wafer shape, size, and material.
Mechanical arm standard arm length: 160mm, 210mm, 280mm (customizable)
AC servo motor with absolute encoder specification for all axes
The S-curve acceleration and deceleration control method can transport wafers at high speed and high precision
Wafer fixation methods: vacuum adsorption, bottom support, edge clamping, Bernoulli non-contact
Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials
Fingers can be flipped, providing optimal finger placement for the type of object being transported, equipment layout, and other requirements
| Atmospheric wafer robot (single arm dual finger) | |||
| Mechanical arm Specifications | STX-1280 | ||
| The object being transported | 2/4/6/8/12 inch standard size wafers and glass substrates. (Customizable) | ||
| Wafer adsorption method | Vacuum adsorption type, bottom support type, edge clamping type, Bernoulli non-contact type | ||
| Repeatability accuracy | 士 0.1mm | ||
| Mechanical structure format | Horizontal multi joint, control axis: 5 axes | ||
| Motor Type | Servo motor | Rated load | 0.5kg |
| Movable range (reference to the center of the third joint of the arm) | Distance to the center of the object being transported 893mm | Rotation angle (0-axis) 340 degrees | Lifting and lowering (Z-axis) 320mm |
| Transportation speed (average) | Arm (R-axis)570 mm/sec | Rotation angle (0-axis) 220 degrees per second | Lifting and lowering (Z-axis) 200 mm/sec |
| Transport speed (maximum) | Arm (R-axis) 1140 mm/sec | Rotation angle (axis) 270 degrees per second | Lifting and lowering (Z-axis) 250 mm/sec |
| Cleanliness | ISO standard Class1-3 (under independent exhaust conditions inside the drive structure) | ||
| Plant operations | Power supply: single-phase AC220V ± 10% 2KVA Vacuum: better than -53kPa (using vacuum adsorption finger) | ||
| Quality | The mechanical arm weighs approximately 37kg | ||
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