JXT-1000 Single Arm Wafer Transfer Robot

Atmospheric wafer robot JXT-2000

Atmospheric wafer robot STX-1000

A-100 Pre-Aligner

Ultra High Precision Pre-Aligner

Used for setting robot action points and monitoring robot status

Used for parallel movement of robots, driven by servo motors and linear slides ..

Sensor type: high-precision reflective laser detection/reflective fiber optic detection

Control mode: RS232C or Ethernet